Monitor the plasma light emission at 2 wavelengths.
To achieve a high precision, miniaturization, low price.
Easily realize the monitoring of etching and cleaning of the endpoints.
Monitoring of plasma etching, cleaning the light emitting.
By using the filter to detect the 2 wavelength, the realization of miniaturization, low price OMRON A3AT-90L1-00D. Isolation: Photocoupler.
Zero cross function: Yes.
Indicator: Yes(Yellow) A3AT-90L1-00D
Applicable output load (See note 1.): 40 A at 24 to 240 VAC(See note 2.).
Rated input voltage: 200 to 240 VAC.
Wide Lineup of General-purpose Solid State.
Relays with Applicable Loads of 5 to 90 A.
AC Output Relays with 75-A and 90-A output currents have been,
added to the G3NA Series OMRON A3AT-90L1-00D.
All models feature the same compact dimensions to provide a,
uniform mounting pitch.
Built-in varistor effectively absorbs external surges.
(except G3NA-D210B).
Operation indicator enables monitoring operation.
Protective cover for greater safety.
Standard models certified by UL and CSA and -UTU models by TÜV OMRON A3AT-90L1-00D.
(except G3NA-410B, G3NA-420B, and G3NA-440B(-2)). Name: Temperature Controller (See note 1 . ).
Power supply: 24 VDC.
No. of control points: 2.
Control output: Transistor output.
Auxiliary output: Transistor output: 2 pts (sinking).
Functions: Heater burnout alarm (See note 3.), Heating or heat/cool,
control is selectable (See note 4.)Event input: 1 point per Unit.
Communications functions: RS-485.
Input type (See note 5.): Thermocouple.
New DIN Track Mounting Temperature.
Controller.
Two channels of temperature control available despite width of,
only 22.5 mm.
The Temperature Controller itself can be replaced without,
changing terminal wiring.
Use in combination with a compact Setting Display Unit to,
reduce communications programming requirements.
Front-panel LED indicators for easy operation monitoring.
Power supply and communications wiring not required between,
Units when mounted side-by-side.
CompoWay/F communications protocol supported.
UL, CSA, and CE Marking compliance. Detected voltage: DC.
Compact, Ecoonomical Plug-in TType Voltage A3AT-90L1-00D.
Sensing Relay.
DPDT output contacts expand the application of the Sensor to,
wide-ranging fields including control, alarms, and indication.
Voltage control is possible in the same easy manner as electro,
magneticc rrelays, as the output relay of the sensor can be driven,
directly with a detection signal A3AT-90L1-00D.
Wide voltage setting range with fine setting capability.
A3AT-90L1-00D Operation manual/Instructions/Model selection sample download link: /searchDownload.html?Search=A3AT-90L1-00D&select=5